Air quality permit for semiconductor manufacturing
Intel Corporation operates two semiconductor manufacturing facilities in Washington County, Oregon. They are the Gordon Moore Park at Ronler Acres campus in Hillsboro and the Aloha campus in Aloha. Both campuses produce semiconductor products, more commonly called computer chips. Both campuses emit pollution and are regulated by DEQ's Air Quality Program under a single
air quality permit, called a Standard Air Contaminant Discharge Permit, that DEQ issued in 2016, modified in 2022, and modified again in 2024.
Public involvement
The public comment period for the draft air quality permit opened on Jan. 10, 2024 and closed on March 8, 2024. DEQ held a virtual public hearing on Feb. 15, 2024. DEQ is reviewing the submitted public comments.
You can also read about key elements of the permit below.
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Expected changes to operations
Intel proposed changes to operations that included additional fabrication (fab) cleanroom space at the Hillsboro campus and increased emissions from the existing fab spaces at both campuses due to advances in manufacturing technology and additional manufacturing support operations. On July 7, 2023, Intel submitted a permit modification application for approval of these proposed changes. Increased emissions of air contaminants are shown in Updated and Previous Plant Site Emission Limits.
The issued permit includes all conditions listed in the “Key conditions in the draft air quality permit retained in the issued permit" section below. For more information and technical details, please see the
Response to Comments.
DEQ thoroughly evaluated all comments submitted on the draft permit and, for issues that lie within its regulatory authority, made corrections and improvements to the permit, including:
Emissions testing for PM2.5 was found to be insufficient but also difficult to perform, so testing of PM2.5 emissions has been added to the permit in the year 2027. Intel is required to submit a study and proposed testing plan to DEQ for approval before beginning the testing.
Property boundary ambient monitoring of NOx for five years was changed to property boundary ambient monitoring of NOx and PM2.5 for three years beginning in the year 2028 when emissions are expected to be higher than they are in 2024 but less than what is allowed by the permit. Intel will be required to submit a monitoring plan for review and approval by DEQ.
As of Sept. 7, 2023, DEQ determined Intel's application to be complete. DEQ held a virtual public information meeting on Oct. 11, 2023. The purpose of the meeting was to provide an overview of the proposed permit, answer questions and learn what community members would like DEQ to consider during the permit drafting process.
People are welcome to send questions any time to Nina DeConcini at nina.deconcini@deq.oregon.gov.
DEQ drafted an air quality permit that complies with all state and federal regulations and considered what was shared at the Sept. 7, 2023 public information meeting. DEQ opened the public comment period on Jan. 10, 2024, which will conclude on March 1, 2024. DEQ held a virtual public hearing on Feb. 15, 2024
For more information and technical details, please see the Response to Comments.
There are several special conditions in the draft air quality permit:
Nitrogen oxides (NOx) ambient monitoring: The purpose of this ambient monitoring is to confirm that Intel's emissions of NOx will not cause or significantly contribute to an exceedance of a federal ambient air quality limit and is protective of public health and the environment.
Best Available Control Technology analysis: This analysis evaluated whether Intel could switch to different pollution controls to better control pollution, taking cost into account. DEQ's analysis found that Intel is already using the best available pollution controls.
Voluntary pollution controls: Intel voluntarily installed two kinds of pollution controls on some of its equipment. First, catalytic diesel particulate filters are installed on some newer emergency generator engines and reduce the amount of particulate matter, carbon monoxide and volatile organic compounds emitted. Second, wet electrostatic precipitators are installed on some wet scrubber exhausts and reduce particulate matter emissions.
More frequent testing: Intel has proposed increasing how often it tests emissions from production process emissions control devices. This includes testing of the rotor concentrator thermal oxidizers every two years instead of every five, and the wet scrubbers every year instead of every five.
Pilot test new pollution controls: Intel is proposing to install and test a new NOx emissions reduction system that has not been tested before. If the test is successful, Intel may install it throughout its facilities. If unsuccessful, it will be abandoned. Note, Intel had applied to run this test under a separate permit modification before the application for the proposed plant expansion project was submitted. For simplicity, DEQ is including the test and the expansion project in the same permitting process.
Intel is subject to requirements under the Cleaner Air Oregon program, DEQ's industrial air toxics permitting program, however, Intel was only required to submit an emissions inventory for the proposed permit modification. This provided DEQ with information on all additional emissions of toxic air contaminants. Intel will be required to complete a facility-wide risk assessment when DEQ formally “calls-in" the facility to the CAO program, which will be done in April 2025 in accordance with the Prioritization Groupings for existing facilities.
Permit application review
DEQ reviewed the permit application materials, pollution modeling and air quality analysis – these materials are below. DEQ considered this information and the feedback at the public information meeting mentioned above when drafting the permit.
Draft air quality permit