Cleaner Air Oregon is a health-based permitting program that regulates emissions of toxic air contaminants from facilities based on risk to nearby communities. CAO requires facilities to report toxic air contaminant emissions, assess potential health risks to people nearby and reduce toxic air contaminant risk if it exceeds legal limits.
As part of the Cleaner Air Oregon process, each facility has a dedicated web page to provide communities access to facility information and updates on where it is involved in the process.
- Each step of the CAO risk assessment process has a section that includes DEQ's communications and deliverables from the facility.
- The graphic below shows where a facility is in the Cleaner Air Oregon Process.
For additional information and history of the program, visit the Cleaner Air Oregon website.

CAO Risk Assessment Process
The Emissions Inventory provides information on all the Toxic Air Contaminant emissions from a facility, and includes information on a facility's operations and activities, as well as fuel and material usage rates. This is often the longest step in the CAO risk assessment process as DEQ needs to verify that all activities have been accounted for, and that the most representative emissions data available are used. In some cases, DEQ will require a facility to perform source testing at this stage if insufficient data is available to estimate emissions. For an introduction to emissions inventories and why they matter, please see EPA's Fact Sheet.
May 29, 2025: Facility called in to CAO program.
Aug. 11, 2025: Facility submits Emissions Inventory extension request.
Aug. 14, 2025: DEQ responds to Emission Inventory request.
Aug. 26, 2025: Intel submits facility Process Flow Diagrams and the Emissions Inventory for natural gas combustion and cooling tower toxics emissions units (TEUs).
Sept. 19, 2025: DEQ sent Intel notification of the due date to submit the Emissions Inventory for emergency generator and fire pump TEUs.
About the Facility
The source Intel Corporation (Aloha Campus & Gordon Moore Park at Ronler Acres Campus) covers two Intel manufacturing facilities, both located in Washington County, Oregon:
- Gordon Moore Park at Ronler Acres campus at 2501 NE Century Boulevard in Hillsboro, Oregon; and
- Aloha campus at 3585 SW 198th Avenue in Aloha, Oregon.
Both campuses are engaged in the production of semiconductor products such as computer microprocessors. The semiconductor manufacturing process begins with thin disks of high-purity silicon called wafers, which then undergo a large number of individual processes to create a number of microprocessors on each wafer. Each individual microprocessor consists of microcircuits containing semiconductor devices such as diodes and transistors. After a group of microprocessors have been created on a wafer they are cut out of the wafer to produce individual microprocessors.